E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) StdTier-Tier1 製品やレチクルの保護あるいはEMI制御について

製品やレチクルの保護あるいはEMI制御について

This Standard is applicable to the color breakup phenomenon on the field sequential color display

Tetramethylcyclotetrasiloxane) used in the semiconductor industry

5 µm範囲）に関係し，気相分析を用いた分析テクニックを述べる。

E13000 - SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) StdTier-Tier1 製品やレチクルの保護あるいはEMI制御についてThis Standard establishes a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300). The PSEM300 consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented. The intent of this Standard is to facilitate the integration of prober equipment into an automated semiconductor factory. This Standard